Energy-Dependent Impact of Proton Irradiation on 4H-SiC Schottky Diodes

نویسندگان

چکیده

In this work, the impact of 200 MeV proton irradiation at a fluence 6 × 10 12 cm −2 on forward characteristics and breakdown behaviour nickel (Ni) titanium (Ti) Schottky barrier diodes is explored. An improvement in ideality factor, reduction threshold voltage, an increase voltage observed post irradiation. Point defects induced by are likely responsible for effects. Deep Level transient Spectroscopy (DLTS) measurements were performed irradiated to analyse created during gauge their potential role changing diode behavior. The high-energy protons compared those formed low-energy 1.8 1 . Finally, consecutive DLTS after series reverse bias anneals low temperatures from 350-700 K explore annealing irradiations.

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ژورنال

عنوان ژورنال: Materials Science Forum

سال: 2023

ISSN: ['1422-6375', '0250-9776', '0255-5476', '1662-9752', '1662-9760']

DOI: https://doi.org/10.4028/p-0y444y